| Contour | |||
| Measuring Range | X-axis | 100mm | 200mm |
| Z1-axis | 60mm | ||
| (from horizontal position ±30mm) | |||
| Straightness (When X-axis is horizontal) | 0.8µm / 100mm | 2µm / 200mm | |
| Surface Roughness | |||
| Measuring Range | X-axis | 100mm | 200mm |
| Z1-axis | 800µm, 80µm, 8µm | ||
| Straightness (When X-axis is horizontal) | (0.05+0.001L)µm | (0.1+0.002L)µm | |
| L=traverse length (mm) | |||
